Research

Research Vision

In the past century, engineering advances in semiconductor manufacturing technologies enabled the production of the vacuum tube and the transistor. The Meng group is broadly interested in applying physics and materials science to the next generation of semiconductor manufacturing. Our research focuses on semiconductor crystal growth for optoelectronic device applications and on characterization of materials towards a structure-based understanding of functional properties. There are several central research themes: growth of novel ferroelectric materials, dielectric breakdown and resistive switching, electrochemical methods, and transmission electron microscopy and other structural characterization techniques. The lab focuses on epitaxial growth of thin films, nanowires, and other nanostructures using vapor phase deposition. We are also interested in method development for transmission electron microscopy: including the use of 4D-STEM to perform strain mapping, crystallographic orientation mapping, and differential phase contrast imaging; and the use of in-situ electrical biasing to study polarization domains in ferroelectric materials. Target applications include random-access memory devices for neuromorphic computing hardware and piezoelectric sensors/actuators. In order to bring a manufacturing technology from the lab to the factory, fundamental understanding of scalable materials synthesis and the relationship between material structure and device performance is necessary.

Wurtzite Alloy Ferroelectrics

While observations of high remanent polarization in wurtzite AlN- and ZnO-based ferroelectrics show significant promise for device applications, many challenges related to electrical leakage and dielectric breakdown remain. We are interested in a physics-based approach to understanding structural origins of electrical properties in these materials. Topics of interest include:

Aberration-corrected STEM image and differential phase contrast STEM image of ferroelectric domains in epitaxial AlScN thin film on Si(111) substrate

Electron Microscopy

We apply Scanning and Scanning/Transmission Electron Microscope (SEM, S/TEM) methods for imaging and spectroscopy towards structural characterization of materials for wide-ranging applications.

Differential phase contrast STEM image of ferroelectric domains in epitaxial AlScN nanowires on TiN/Si(111)

Aberration corrected HAADF STEM image of epitaxial TiN/MgO(001) interface

Electron backscatter diffraction misorientation map of double punch molded Cu showing grain refinement and geometrically necessary dislocation storage